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Keyword [MEMS CAD]
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1. Computer-aided Design And Simulation Of Mems Devices
2. Opengl-based Mems Process Geometry Simulation Technology Research
3. Mems Cad Device-level Macro Model Of Access To Technology
4. Three-dimensional Surface-Miacromachining Process Simulations Based On The Narrow Band Level Set Method
5. Three-Dimensional Miacromachining Simulations Based On The Narrow Band Level Set And Monte Carlo Method
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