Computer-aided Design And Simulation Of Mems Devices

MEMS is a rising research domain, and the development of MEMS devices always adopt the traditional methods of trial and error. With the improvement of theory level and complexity of devices design, the traditional ways have not met designers' needs. Along with the development of computer technology, Computer Aided Design of MEMS devices has aroused designer's attention, especially, in the condition of the difficulties that the existing equipments have been not satisfied with experiment tests, the research of Computer Aided Design of MEMS devices takes on the significance. In this paper, we researched the methods of Computer Aided Design and simulation of MEMS devices, and provided the process of it. The methods are detailedly explained through the design and analysis of two typical MEMS devices. The performance of this paper is as follows:Firstly, the characteristics and design principles of MEMS devices CAD were investigated, secondly, the methods of design and simulation were presented, thirdly, the system structure of design was researched, finally, the whole process, CAD of MEMS devices, was explored.Two typical MEMS devices, Micro-Switch and Micro-Mirror, are designed, including structure, process and driving principle.Simulation of two devices was carried out, which included electricity and stress-strain analysis. Force-electricity coupling and the algorithm that are Newton and Relaxation were emphatically researched, then some key parameters, such as pull-in and release voltage and contact force, were obtained, the devices were optimized at the same time. Finally the concept of Macro-model was presented, and then the significance and the common approach of extracting Macro-model were investigated.It has been proven that the methods of MEMS devices CAD presented here is feasible through two typical devices design and simulation.Through this paper, it can provide some foundations for CAD of MEMS devices and simulation, improve the quality, shorten the development cycle, and make progress of the domestic design level.