Investigation On The Thermoelectric Properties Of Si Microchannel Plates

The thermoelectric properties of silicon microchannel plates are described in this article, after electroplating of iron and annealing process, the silicon microchannel plates turn intoβ-FeSi2 microchannel structures, and make the thermoelectric characteristics of the microchannel structures improved significantly. In our experiment, the silicon microchannel plates are fabricated by using photo-assisted electrochemical etching process(PAECE), and the microchannel has a square lattice distribution. In this paper, the thermoelectric properties of microchannel structures are analyzed and contrasted, which are relating to the crystal orientation of the microchannel structures. When the test electrode and the lattice into a 45-degree, the Seebeck coefficient of the sample is maximum; and the Seebeck coefficient shows a good symmetry of about 45°whenθincreases from 0°to 90°. From the principle of thermoelectric effect, the Seebeck coefficient of microchannel structures is mainly studied, besides, the Peltier effect of microchannel structures is considered tentatively, and the mechanism of thermoelectric effect is also analyzed preliminary. This Paper includes the following aspects:The first chapter introduces the applications of the silicon microchannel plates, starting from the introduction of silicon MEMS technology, microchannel fabrication processes are described. Thermoelectric materials research situation, as well as the work carried out in this paper is also introduced.Chapter two from the principle the formation of porous silicon, the manufacture of silicon microchannel principle and processes are introduced, and several major factors that affect the silicon microchannel plates including current density, temperature, bias voltage, etching liquid ratio and so on are researched.In chapter three, iron plating process and theβ-FeSi2 microchannel structure production process are described briefly.In chapter four, the thermoelectric properties, mainly the Seebeck effect and Peltier effect of microchannel structures are tested, and test results are analyzed and discussed.Chapter five summarize the work of the full text, and prospect the microchannel structures in thermal power use.