The Design And Implementation Of Data Storage Management System In Photomask Manufacture

As semiconductor process node advances,the photomask manufacture which plays an important role in the semiconductor production process is also facing more and more challenges. In particular, into the 90nm era, photomask data conversion computing and related file size has emerged scale explosive growth, so the performance of the storage system has been made ever-increasing demands. This paper is to design and realize one massive unstructured data storage management system with high-performance, low cost, high automation and high availability,based on mainstream technology.In the current enterprise-level storage area, the main storage medium are hard disks, magnetic tapes and discs, respectively, which corresponds to the storage devices are disk arrays, tape drives, tape libraries and discs library. The network storage technologies are DAS, SAN and NAS.Reference to the technical characteristics of a wide range of storage, the overall photomask data storage management system is designed with target to achieve the 4 performance in the paper. Firstly, it analyses the original photomask SAN storage architecture and provides innovative high-performance 10Gbps NAS hierarchical storage architecture design. Secondly, with use of hierarchical storage management (HSM), low-cost hierarchical storage architecture is designed. Thirdly, combining with information lifecycle management (ILM), the photomask data storage management overall functional design is proposed, which the realize data management and data conversion automaticly. Finally, management system uses a high-availability clustering (HAC) server clusters architecture to achieve high availability.Speciality of the system is the function about photomask data automated management, including archiving, data management,backup and monitoring of the four modules. In the Charper 4, the 4 models are detailed designed and analysed.Topics in the testing stage, the key parts of the system are tested. Specific point of view, includes the NAS framework for performance testing and HAC system architecture for high-availability test, as well as four key modules operation test. That's the preliminary evidence of the effectiveness of the system.Topics in the verification stage, a photomask production test and the achievement of the management system to effectively verify the practicality of the system. Specific point of view, NAS architecture and on-line performance test results show that the system is running the high-speed data processing capabilities; HAC cluster server system architecture test and the actual situation to set up a high availability requirements are; and classification analysis shows that the cost of storage costs conservation status; various management module to verify the results on-line automated management objectives.The photomask data storage management system is realized in some mask shop, which fully verifies the feasibility of the system. In the topological structure, the deployment of high-availability requirements is emphasized. The logical relationship between modules highlights data management automation. And form the on-line status, the results of cost analysis and performance analysis reflect the low-cost, high-efficiency advantages.Although the photomask data storage management system has made great progress, there is still something needed to improve. Such as, disaster recovery design is too limited, high availability is not perfect and SATA archiving is not fully automated. The semiconductor process has already begun moving towards the 32nm even 22nm node and the pace of storage also emerges many new technologies, the future of the field bound to face more challenges and greater improvement space.