Research On The Halogen Modification On The Surface Of The Diamond Film Deposited By CVD

Diamond films have aroused many scientist's interests its remarkable properties in mechanics, thermology, optics, electrics and acoustics. So far, the investigation of CVD diamond films has been the high spot of materials, physics and chemistry. There are many methods to prepare diamond film, but compared with HFCVD, a lot of problems exit in other methods, such as high equipment cost,complex installation and hard to control the quality of the film. The boron doped diamond film of P type, prepared by HFCVD, not only has the specific physical and chemical characteristic of diamond, but also has electric capability, which expands the practical usage of the diamond film in the electronic field.The diamond is constituted by carbon, and it has fine compatibility with organism, so the diamond film will have a bright foreground in many fields. To modify the surface of diamond film and to design its microstructure, that is, to import organic molecule or metal and metal oxide to the surface of the diamond film, improve its surface performance, and it will expand the application fields of the diamond film. The question for discussion is to import active group to its surface. After the active group was modified into the surface of the diamond film, it can activate the surface of diamond film to import all kinds of needed molecule further more.By using HFCVD prepare boron doped diamond film and observing its surface through SEM, this thesis researches the functional modification of the diamond film. This thesis includes the following three parts:(1)Research on the structures and characteristics of the diamond and the methods to prepare diamond film; research the technologic parameter of HFCVD in details; explain HFCVD in theory; set up a set of technologic conditions that can be applied to the preparation of the diamond film, and successfully prepare diamond film in high quality.(2)Research on the common methods of the modification of electrode chemistry, and on the functional modification of the diamond film; provide the strategy to modify the diamond film with halogen, successfully modify the diamond film with halogen and explore reaction mechanism and applications.(3)Research on the methods of observation of the diamond film, and observe the film modified by bromine; analyze the data to find the bromine can be successfully modified into the surface of the diamond film.