No Supported High Quality Diamond Film's Deposition And Infrared Transmission Characteristic

ZnSe,ZnS and Ge were the normal material used in infrared windows and shield material , but with the speed of flight device was improved and active condition was severe rugged environment those materials can't meet the need, the more excellent material was needed.High quality CVD diamond film has high thermal conductivity, hardness, and chemical stability.The absorption coefiflent at 10.6μm of CVD diamond is two grade than infrared material's, but the thermal lensing is smaller than that of infrared material's .other's work shows including the thickness of ZnSe and diamond . that the thermal lensing of diamond can be ignored. Diamond film is transparent from ultraviolet through visible to far-infrared wavelengths because of its wide bandwidth of 5.4 eV. It possesses great hardness and very good chemical stability; therefore, it is an ideal material for infrared windows material.In this paper, diamond and diamond thin film's character, developing and application were described, chemical vapor deposition's theory , method of deposition were introduced. the experiment was done using two methods of deposition. The aim of this experiment was to explore the technological parameter and principle of big area optical CVD diamond film.The main work had been done as following:1) Diamond thick films were deposited using Hot Filament Chemical Vapor Deposition (HFCVD) with multiple continuous deposition. The thickness get to200μm .2) using Hot Filament Chemical Vapor Deposition with vacuum-reduced ,can get preferred orientation of(110),thetransmissivity at 10.6ωm is 40%.3) The optical quality diamond films were deposited onto a silicon substrate using the Microwave Plasma Chemical Vapor Deposition (MWCVD). The infrared transmissivity is 70%, it has preferred orientation of (110).