Design And Implementation Of Dust-removing Control System

With the rapid development of chip manufacturing process,there is a growing demand on the environment of electronic product development and dust-removing. Traditional dust-removing process is conducted manually;therefore,it has many shortages,such as arbitrary and poor effect.Based on the research analysis of dust-removing control process and utilizing the powerful microcontroller produced by Freescale as the main control chip,the thesis designs a set of automatic dust-removing control system commissioned by an IC manufacturing enterprise in Wujiang,Suzhou.The hardware platform of automatic dust-removing system contains the minimum system MC68HC908GP32 module,keybord data input module,switch input and output module,digtal tube display module,heating module,clock module and so on.And its software platform mainly contains the low-leveled software in the MCU and the control software in PC.The main functions of low-leveled software contains sensor data's acquisition and processing,control of pilot lamps,8-channel switch output of dust-removing control system and online programmes.The main functions of high-level software of PC are set of the working hours of dust removal system,online update of MCU and so on.The thesis gives the design on hardware of operation panel and control panel of the dust-removing system as well as the design on software of general hardware driver module and functional module of the dust-removing system.Also it describes the emphases,difficulties and details of software design of dust-removing control system,especially discuss the solutions of 3-channel switch input signal collection,the amplification and isolation of 8-channel switch output signal.At the same time,it conducted a more in-depth discussion of automatic dust removal process.Finally,in order to verify the stability and basic performance of the dust-removing system,the testing programmes to carry out an integrated hardware and software module testing.The results show that the dust removal system can operate stably and reliably,efficiently fulfill the mission of dust-removing,improve the degree of automation of dust removal equipment,purify the products of the environment and ensure the quality of products.