Theory Research On Micro Electrostatically Actuated Diaphragm Pump

With the growth of IC technology, MEMS has developed remarkably, and has attracted more and more attention on scientific and technical area. As a major branch of MEMS, microfluidics has been a popular research field in recent years. The rapid development of micrvalve and micropump indicates further the success of microfluidics. However, after entering 21st century, researchers have no more satisfied with those highly specialized, single-function, stand-alone components. They are taking more and more consideration to integrating those components into coordinated, multi-functional micromachines.This thesis focuses on modeling and analysis on micro electrostatic diaphragm pump or compressor. The diaphragm of the pump or compressor is a kind of multilayer structure and actuated electrostatically. The thesis is devoting mainly on modeling the operation mechanism of electrostatic micro pump or compressor.On the basis of Saif’s work about minimum energy method, a model on micro pump or compressor, this thesis showed some deep work, improving the minimum energy model and establishing two analysis models, and also presented related analytic solutions. The first model, that is single cavity deflection trial minimum energy method, whose investigation subject is relatively simple, can be compared with part available research. Its diaphragm has been improved on the basis of Saif model, thus the results fit actuality even more. Combining the advantages of aforementioned models, the second model, that is double cavity deflection trial minimum energy method, can restrict diaphragm deflection to raise pressure head with a double cavity.In order to understand the effect of some key design parameters, diverse diaphragm thickness, dielectric thickness of diaphragm and driving voltage are analyzed to investigate the relation between design parameters and pressure head of micro pump or compressor. Results are obtained after analysis. The advantage of double cavity deflection trial minimum energy method is obvious compared with single cavity models. With double cavity configuration, it can increase flow rate to improve work efficiency, reduce diaphragm deflection to raise pressure remarkably, meet compressor design.