| Film manufacturing technology is based on microelectronic devices and micro- optoelectronic devices; various films are applied to a wide range of MEMS (micro-electro-mechanical system). With the in-depth understanding of the relationship in film manufacturing technology, microstructure and mechanical properties, which is the common key supporting technologies for optimizing the design of MEMS devices, lasting the life of MEMS devices and improving reliability, improving the design which constraint product's life cycle. In micro-nano-scale, as films size effects and surface effects, its macro-mechanical properties of materials is essentially different from the traditional method of detection and assessment is no longer applicable.This thesis is oriented on the requirement and development on film manufacturing technology, developed a hardness testing system for the detection in micro-nano-mechanical properties.Development of a new type of nano-micro hardness tester reducing vibration isolation platform for the development of micro-nano surface hardness testing equipment to provide technical support, to ensure that its work in the measurement precision and accuracy. Complete a three-dimensional movement workstation's structural design, layout and its vibration and effective platform together.Implement of micro-nano-hardness testing system of three dimension motion control workstations, and the loading device fretting control and signal detection, laying a stable substructure for accurate hardness testing.On the basis of fundamental nanoindentation theory, nanoindentation of film aluminum has been researched. According to experimental results, load-displacement curves have been fitted. The hardness curve of film aluminum along different indent depth has been achieved then the hardness rules under different loads are analyzed as well. Operating performance of the system has been assessed. Also, influence factors and its resolve measures have been presented in the paper. |
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