Nanometer Precision Grating Table Bearing Design And Research

The study of optical grating displacement measuring techniques which is a traditional subject and have realistic meaning , after its developing in recent decades, it has become a mature technique. But now, the modern technology make it have develop potential in many directions once more, especially, the wide range, high accuracy, high-resolution, and low cost displacement measuring techniques has great application prospect in super finish, micro-electronics, MEMS and micro-nanoscale technology etc. This is the back ground of my study, and the main contents of my work is as follow: we propose one design scheme of the high-precision optical grating's nanoscale supporting work-bench, in which we give work-bench's structure and carry out a thorough study of the stepping motor's work features. We design the optical system of the work-bench base on the interference principle of optical grating, and make an analyze to the type of the optical grating, the principle of Moire fringes and the subdividing techniques, then sum up some subdividing techniques, and take a study of the main components of the optical system: light source, optoelectronic receiving unit, cascade spacing etc. We design a hardware quadruple circuit to subdividing the Moire fringes in 800 with software, and make commumication with the computer through the 8751 serial port. We write the program of host computer's software with C++ language, In the tests of work-bench, we found the results is in line with the technology standards. At last, we analyze every factors which may influence system accuracy of the optical grating displacement measuring techniques.