Study On Photoelectric Measuring Technology For The Large Diameter

Based on laser optical triangulation displacement inspecting technology, grating displacement inspecting technology, fine mechanics technology, computer real-time control and data processing technology, a photoelectric non-contact inspecting system for inspecting the inner and outer diameter, shape and position error of large-scale workpiece are presented. The constitution, overall structure, inspecting principle and methods are described in this article.In this article, aimed at the inspecting characteristics and difficult aspects of large diameter measurement, "single series translating and revolving semiconductor laser probe and grating displacement measuring system associative inspecting project" are researched. The corresponding inspecting system is designed.In this article, the laser optical triangulation displacement inspecting principle, optical system design and photoelectric position sensor PSD working principle and characteristics, grating displacement inspecting principle, fine mechanism system ,computer control and data processing system are described detailedly. The origin of system error and its influence on the precision of system inspecting are analysed. In succession, the conclusion of error analysis is presented.The accuracy of inspecting system is verified by experiments. The results of experiments show that the inner and outer diameter measuring error is less than±0.05mm , the shape and position error is less than±0.05mm, the inspecting repetition error is less than±0.004mm. Therefore, the inspecting system can satisfy the inspecting accuracy demand for the dimension error, shape error and position error of the large -scale workpiece diamente.