Study On The Electrochemical Fabrication Technology Of Two-Dimensional Photonic Crystals On Silicon

Photonic Crystals are optical structures with wavelength-scale periodic variations of the refractive index. There are particular frequency bands, which are called photonic band-gap (PBG), transmitting in the periodic dielectric materials. Light with frequency in the PBG can't propagate through the Photonic Crystals. For this reason, Photonic Crystals have many potential applications in devices.The paper first introduced the concept and applications of Photonic Crystal, then elaborated the basic principle and the theory of Photonic Crystal. On the theoretical base, we design a set of technical process, including the corresponding test installation, and analyze gradually the whole technological process. Then we discuss and study the problems.We emphasize the accuracy of the experiment parameters and analyze impact factors extensively. We also present the experimental curves of the parameters, which play an important role in the technologies.