Optical filters are the key devices for nodes and terminal elements in IP-over-WDM optical networks. The optical filters based on resonator attract great interests due to their simple structures, high performance and compactness. In this paper, the III-V Multiple Quantum Well (MQW) planar waveguide resonator filters are studied, including the theoretical model of the filter with four ports, numerical techniques for analysis of the filters, and the optimization, fabrication and test of the corresponding filters.Firstly, three kinds of material system, InGaAsP-MQW based on InP, InGaAs-InAlAs MQW based on GaAs and GaAs/AlGaAs, are presented. The characters of modes and propagation in optical rib waveguides are analyzed in detail, and the structural parameters of single mode waveguide are obtained. Then, by using Time Domain Finite Difference (FDTD) method, the rectangular and racetrack resonator filters in InP/InGaAsP-MQW, and ring resonator filters in InGaAs-InAlAs MQW resonator filters are designed and optimized. The optical field distributions and filter spectrum are given. Thus, the feasibility of presented project is examined. Finally, the samples of resonator filters are fabricated by using domestic techniques, and tested by using the 81910A photon all parameters test system. The tested results agree well with theoretical results. |