Research On Kinematic Performance And Evaluation Methods Of 6-SPS Parallel Micromanipulators

A 6-SPS parallel micromanipulator with 3-2-1 orthogonal chains is presented in this paper. By using coordinate micro-transform theory, kinematic analysis is accomplished and the constant Jacobian matrix is attained. The parallel micromanipulator is a decoupled mechanism kinematically. By using Lagrange methods, the velocity, acceleration and workspace performances are deduced.To analyze the static performance, a static model is founded by using screw theory, and force Jacobian matrix is attained. Also static stiffness analysis of the micromanipulator is implemented, and carrying capacity index and static stiffness index are attained.Accuracy is an important index to evaluate the performances of the parallel micromanipulators. By using differential methods to linear locally the nonlinear problem, geometry error model is founded. Then precise index and error sensitivity index are deduced.After synthesizing all kinds of performance evaluation indexes, fuzzy synthesis evaluation method is introduced. By using this method, a three layers fuzzy synthesis evaluation system for the 6-SPS micromanipulator is created to evaluate its whole performance. What is more, this fuzzy synthesis method can be used to evaluate other parallel mechanisms.Using flexible hinges instead of common kinematic pairs can enhance micromanipulator's precise. Flexible hinges are designed and 6-SPS parallel micromanipulator solid model is created by using software Pro/E. 6-SPS parallel micromanipulator's kinematics simulation is implemented by using finite element analysis(FEA) software. And the analysis results indicate that the parallel micromanipulator is kinematically decoupling.