Design And Analysis Of A Novel 3-PRC Large Stroke Compliant Parallel Micromanipulator

Micromanipulation technology is a cross discipline that involves multi-disciplinary fields such as robots,precision machinery,computers,intelligent control and so on,it is a new research direction with the application of robot technology in micro/nano technology fields.With the further development of compliant mechanisms in recent years,domestic and overseas scholars constantly research and design many types of compliant parallel micromanipulator(CPM)in the micro-robotics field,from one-DOF(degree-of-freedom)mechanism to two-DOFs parallel micromanipulator,from low-DOFs parallel mechanism to six-DOFs of parallel micromanipulator,from planar CPM to spatial CPM.With the development of bioengineering and medical fields,the research on CPM has put forward to strictly requirements than before.In order to meet the requirements of bioengineering and medical application,a new type of secondary lever amplification mechanism is designed to compensate the stroke of the piezoelectric(PZT)actuator,and this mechanism employs the right circular flexure hinge for the purposes of avoiding assembly errors,and then determined the final configuration of the novel 3-PRC large stroke compliant parallel micromanipulator.Secondly,the axial force of the flexure hinge-based joints of the second lever amplification mechanism and the stiffness matrix of the 3-PRC CPM were calculated.The stiffness of the mechanism was verified by ANSYS finite element analysis software.Then,the kinematics model of the 3-PRC parallel micromanipulation platform is derived by using vector method,the forward and inverse kinematics solutions of a 3-PRC parallel micromanipulation stage were emphatically analyzed,then the Jacobian matrix of kinematics model and workspace were derived by MATLAB software.The decoupling characteristics of the 3-PRC CPM are analyzed and validated by finite element method.Finally,the dynamic model is established by Lagrange's equation,and the natural frequency of the mechanism is calculated.The modal analysis is carried out by using finite element method.The theoretical natural frequencies of the 3-RPC parallel microoperation platform are obtained and verify the correctness of the theoretical natural frequency of the mechanism.The results showed that the proposed 3-PRC CPM can realize translational motion along X/Y/Z axis in micro range with better decoupling and input-out characteristics,it can provide some practical values in the field of bioengineering and medical fields.