The Study Of 3-D Capacitance Extraction Algorithm

Accurate electromagnetic parameter extraction is very important in the design of integrated circuit, and the capacitance parameter extraction is of most importance among it. The boundary element method is widely used because of high accuracy, less variables and fitting complex boundary problems.The influence of parasitic interconnect capacitance is much in evidence with the progress of the semiconductor techniques and the increase of chip density and calculated speed. For the existing capacitance extraction software can hardly satisfy the needing of actual projects, it is an urgent task to develop a new algorithm or combination of existing algorithms with high accuracy and speed.Indirect boundary element method and multipole accelerated algorithm are used in capacitance extraction, and a program was built based on this. It is an efficient capacitance extraction method, which is the combination of the indirect boundary element method and multipole accelerated algorithm. We introduced the basic principles of boundary element method and the multipole accelerated algorithm with great emphasis and explained the idea of program in brief. The problems of the discretization of the conductor's surface, the segmentation of conductor model and index of the result, the realization of the multipole accelerated algorithm are also discussed in the thesis detailedly. The efficiency of the method was proved with representative example at last. Finally, the realizing step of GMRES (m), which is an efficient method to solve large linear equation group, is introduced.