Study On Simulation And Fabrication Of Magnetic Bead Microchip Based On MEMS Technology

Magnetic Bead (MB) can be used as solid-phase carrier for biomedical reactions. It is widely used in biomedical engineering for its high surface area, coupling capacity and convenience of being manipulated. Combining silicon and polymer MEMS technologies, the chip-level devices for MB manipulation are fabricated to construct the MB-based bio-microsystem, which has become one of the most attractive research points in μ TAS.In the research on MB microsystem based on MEMS technology, the design and fabrication of a MB chip is the key process. This thesis study the simulation of electromagnetic field of MB chip and two key fabrication processes—fabrication of planar electromagnetic devices based on UV-LIGA and polymeric microfabrication.The topics of this dissertation are presented below:1. MB technology and its applications in biomedical engineering are reviewed. Research scheme is elicited on the basis of the investigation about achievements concerning MB technology and its microsystem.2. The mechanism of MB chip is studied. FEMLAB and MATLAB are used to simulate the electromagnetic field and to analyze the feasibility of MB capture, all of which provide efficient guidance for fabrication;3. The fabrication of planar electromagnetic devices based on UV-LIGA is studied; process of embedded planar coil (used for on-chip MB manipulation) by switched electroplating on single seed layer is developed;4. Polymeric MEMS processes, such as SU-8 multilayer fabrication, structural releasing and bonding, molding of PDMS 3D structure, etc, are further studied and can be utilized in fabrication of complex microfluidic devices;...