Design And Simulation Of MEMS Mmonetic Field Sensor

In order to achieve the peaceful utilization of fusion energy,EAST superconducting Tokamak,which is based on fusion,exists as an important experimental platform for the steady operation of advanced plasma in China.With the improvement of the performance of EAST discharge parameters in the future,the realization of 1000 s level plasma discharge and the long pulse quasi steady state will be an inevitable trend of development.However,the traditional measurement technology will not meet the accuracy of EAST strong quasi steady magnetic field measurement.Therefore,the research of the EAST internal magnetic field measurement technology with high performance will eventually become a challenge that cannot be ignored.Compared with the probe measurement used by measuring the variation of the magnetic induction current,MEMS magnetic field sensor has the advantages of high resolution,high precision,miniaturization,high temperature,and the manufacturing technology of MEMS compatible with the IC process,and can mass produce in reality.But because of the use of materials,the harsh process conditions in the actual preparation of MEMS magnetic field sensor,and other restrictions,strong magnetic sensors,compared to weak magnetic sensor,is quite few,in the market,especially magnetic sensors of Tesla magnitude is rarely reported in the newsessays.Therefore,it is imminent to study the magnetic field sensor in the complex magnetic field of EAST.In this essay,two kinds of capacitive MEMS magnetic field sensors have been designed.The principle is that in the magnetic field,the electric coil is driven by the external force to drive the moving block to change the capacitance,so that we can speculate the magnetic field value of the MEMS magnetic field in the environment.In this essay,the plane torsional magnetic field sensor is simulated and analyzed,and the function of the structure is optimized by changing the parameters of the structure.In the measurement range of 0.05 T~1.5 T,the coil of the plane torsional magnetic field sensor is inserted into the sinusoidal current.By adjusting the number of turns of the coil,the length of beams and waist angle,the resolution of the structure is up to 122.86 pF/T,and the resonant frequency can reach 41.1 MHz.The modal analysis and stress analysis are also carried out to study the structure performance of the comb like magnetic field sensor.