The Fabrication Of Polymer Arrayed Waveguide Grating Multiplexer

The wavelength division multiplexing (WDM) is one important technology for fiber communication, because it is the efficient method to enlarge the speed and capacity for the current fiber network. An arrayed waveguide grating (AWG) multiplexer is one of the key devices of WDM. It possesses some advantages, such as easy optical integrating, narrow wavelength spacing, much more signal channels, low" crosstalk and so on. Compared to organic AWG polymer AWG possess excellent particular features, such as the price of material is low. easy fabrication and it has great market. The 32X32 polymer AWG of which the centre wavelength is 1.550918um and the wavelength spacing is 0.8 run. was fabricated using the technology concluding Spin-coating. Vacuum evaporation. Photolithography and Reactive Ion Etching in this paper. The main content of this paper include three parts:(1)The fabrication process was explored using polymeric materials named PMMA. And the combined layer masks were used in the fabrication to compensate the damage of the resist. The experiment gave the result that 100nm is the best thickness for aluminium mask. The samples of AWG were tested. And the one with combined layer masks has the better property.(2) The 32×32 AWG multiplexer was fabricated using polymeric materials named PEEK. The Steam Remelting technology was used to modify the scatter loses which is due to the ronghness of the surface of the waveguide. The root-mean-square roughness of surface of waveguide was reduced by 16.743nm.(3)Set the testing system of the character of the AWG device. The 32×32 AWG multiplexer was tested, and the 32 wavelength was enumerated. Obtained the curve of the intensity distribution at corresponding wavelength...