Research On The Thermal Field Control System Of CZ150 CZ-Silicon Crystal Furnace

A modularization-control system of Silicon Crystal Furnace based PLC is discussed in detail. Because of its modularization-structure, it has strong expansibility, good flexibility and good maintainability.with changing a few hardware modulars and modifying software, it can meet the requirements of most control systems of Silicon Crystal Growing Furnace.Aiming at the actuality in the thermal field of the control system of Cz-Silicon Crystal Furnace, the PID and fuzzy control is raised and realized. This newly constructed system is tested by practical experiment on its control effect and the result shows that our design can meet the design guideline and work effectively.This thesis consists of seven sections:Chapter 1 shows the research background, analyzes the present research development on the field of the CZ150 Silicon Crystal Furnace and finally gives the research content and method of my paper.Chapter 2 researches on thermodynamics and heat-exchange of the Crystal, after that the thermal field model is upbuilded.Chapter 3 detailedly depicts the PID and fuzzy control. Firstly its characteristic is tested and studied.Later, PID and fuzzy control arithmetic are used for controlling, experiment data are analysed and studied, with that the resusts are presented. Laatly parameter of the PID and fuzzy control is corrected subjectively so that the perfect effect is achieved.Chapter 4 detailedly depicts the implement of hardware about the control system of Silicon Crystal Furnace with PLC based. Firstly the hardware condition is mentioned. Later, each module interface and function is introduced.Chapter 5 detailedly depicts the implement of software about the control system of Silicon Crystal Furnace with PLC based .Firstly the integered frame of software system is discussed. Later, each programmable module is analysed step and step.Chapter 6 explains the system experiments that are carried out to test this system design. After experimental curve and data analysis, the result shows that our design can meet the demand of this project and can work effectively.Chapter 7 is a summary of the whole research work.The main achievements of this thesis are menthioned and the conceit of the further developing work is pointed out.