| The dissertation based on microscope detection system of CCD, for the dimension parameter measuring method conducted in-depth research, the establishment of general detection system of dimension parameter based on CCD. The system to the original software systems have done a lot of improvements, and further perfect the original measurement system functions, and increase the border extraction algorithms, manual measurements, dimension detection, and measurement of large dimension measurement ,solutions to the single measuring issue, makes it as a common set of dimension measuring systems.Proposed a new mobilizable coordinates measuring programme designed measuring length, measuring round and measuring angle coordinates three different measurement coordinate system for the measurement coordinate system applies a set of images, and given the three coordinates of the transformation function.In large dimension measurement techniques, on the two-dimensional optical microscopy work platform displacement signals collection, the introduction of raster feet to achieve large dimension measurements designed raster signal acquisition circuits, a collection of analytical studies of the key circuits, the corresponding solutions, and discussed work platform displacement signals, image data and the actual dimension; Meanwhile driving mechanism designed electrical circuit, laying the foundation for the measurement of two-dimensional work platform automatically.Mobilizable coordinates in the use of the system detection ordinary small dimension measurement precision to repeat: measuring length,measuring round coordinate system for the±0.3μm, measuring angle coordinate system for the±2°. Large dimension measurements repeat accuracy±0.7μm(1000μm above experiment with the volume of pieces as a standard). Repeat accuracy of diameter measurement of image processing is±0.1μm, angle measurement accuracy is±0.5°. Experimentally demonstrate that the technology can be applied to practice. |
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