A Study On Vertical Cavity Surface Emitting Lasers Arreys

Vertical-cavity surface-emitting lasers (VCSELs), as a new type of lasers, possess superior photoelectric performances. VCSELs are convenient to be produced two dimensional high-density arrays because of their output beams vertical to substrate. So the related researches on VCSELs arrays have turned into a hotspot in the world.Starting with the fundamental theories, this paper studies the characteristics of Distributed Bragg Reflectors (DBR) as VCSELs' resonant cavity mirrors and gains the related parameters. After discussing the heat effects in arrays, we get the optimal distances between devices. We investigate wet oxidation technique and obtain the best appropriate oxidation parameters. The VCSELs chips oxidated are employed to a 3 × 3 arrays. In the end , we make out a VCSELs testing system by ourselves which can be used to elementarily measure the properties of the VCSEL chip including radiation, threshold current, near field, far field, etc.