Vertical-cavity Surface-emitting Semiconductor Laser Insulation Membrane Technology Research

Vertical cavity surface emitting laser diode, is a new type of semiconductor lasers with low threshold current, low power consumption, high efficiency and small divergence angle of the advantages of optical interconnects and optical information in the fields of a wide range of applications.This paper briefly describes the vertical cavity surface emitting lasers defined structure based on the principles expounded VCSEL research progress and application, and in part of the preparation process VCSEL research and optimization; an overview of the complete production of the complete VCSEL the process; by magnetron sputtering were prepared with high thermal conductivity of the AIN film, and using SEM, spectrophotometer, etc. of the films were tested and the results were analyzed using the ANSYS finite element analysis software on the film the simulation of thermal stress analysis, the film thickness on film morphology, transmission and other properties of law; on the packaging technology has been improved, improved device performance.