Design And Fabrication Of10G Bit/s850nm Vertical Cavity Surface Emitting Lasers

Nowadays, the technique of optic fiber communication is making a huge progress anddeveloping rapidly. To be companied, the demand of bandwidth from optical ROSA/TOSAfor delivery service has risen up to40Gbit/s, or even100Gbit/s.850nm Vertical CavitySurface Emitting Lasers, the crucial part of the shortwave optical data communication, isnow occupying in the field of data communication.As the main part of optic transmission module, VCSEL has special advantages if itrefers to other sorts of LASERS, such as low threshold current, small expanding angle,better beam quality, easy to be arrayed, etc. The high quality optic beam could minimizethe difficulty of optical coupling correction. The small threshold current could lower thepower loss for the laser. Meanwhile, when it operates at a relative high temperature, thevariety of threshold current is much more flat, which makes benefit to realize autotemperature compensation．Otherwise, arrayed integrated VCSELs provide possibility for1×4and1×12optic transmission module.In this thesis, precise design of Distributed Bragg Reflector of VCSEL ensures thereflection of the mirrors to the level of99%. Based on detailed calculation of the structureof the quantum wells, the peak wavelength and FWHM of spectrum have reached to theindustrial standard. The design of the multi-layers structure, optimizes the distribution ofoptic field and the electric field. Through plenty of time for fabrication study, the reliabilityand the threshold current performance has been improved enormously. In addition, theyield has increased by stable fabrication procedure, which offers favorable term for lot sizeproduction.