Design And Research Of Water Guide Laser Cutting Machine Control System

Wafer as the base material of electronic components whose cutting is a extremely important process in the semiconductor industry, with the wafer substrate size increases, the decrease of the thickness and size of refinement crossed, the shortcomings of the original cutting technology gradually exposure. The water guide laser cutting as a new cutting technology which focuses the laser into a micro-fine than a human hair r water column to cut the wafein this technology has overcome many shortcomings of traditional technology is being more and more research and application.In this paper, we design and research of the water guide laser cutting machine control system, main content includes hardware platform, software programs and whole machine system debugging. First, PC plus control card as the overall control scheme is establishe after analysis the system accuracy, speed control requirements. Hardware system is built including PMAC2-PCI Lite control card as the core of the moving platform, plus CCD camera binocular vision platform, and digital I \O and other peripheral devices. Second, in PC Visual C + +6 development environment and MFC for the thematic framework the multi-tasking software of control system is written, which contains wafer calibration of image processing procedures,which accurate computes the circle center place of wafer in the world coordinate system using edge detection, connectivity analysis, least square fitting and camera calibration algorithms based the OpenCV; trajectory planning, digital I \ O control, real-time condition monitoring of PLC programs as well as pulse plus direction output control servo and stepper motor motion control program based on PMAC and the man-machine interface program setting PCOMM32PRO as dynamic link library;At the same time,actually tuning PID parameters using the orthogonal grating 0.1um resolution as position feedback assurances repeat positioning accuracy of system. Finally, positioning accuracy and whole machine condition are tested. Experiments show that the design of the control system works well, meets real industry needs.