The Coarse And Fine Coupling And Synchronous Control Of The Lithographic Projection Apparatus;the Coarse And Fine Coupling And Synchronous Control Of The Lithographic Projection Apparatus

The lithographic projection apparatus is the basic of the manufacture of integrated circuits. The coarse and fine coupling control system is the core of this apparatus.The key technical research of coarse and fine control about the precision stage system is how to control the research object with linear motor-driven and air-guide bearing. To answer these questions, I propose some methods to resolve the high-speed and high-precision control problem.The key technical problems about the lithographic projection apparatus are studied in this thesis. The main contents are vibration models of the precision stage in motion processes, dynamic characteristics and responses while changing the model parameters, and the motion control system design of the precision stage. A lithographic apparatus comprises a first movable element and a first control system to control a position quantity thereof. Also, the lithographic apparatus comprises a second movable element and a second control system to control a position quantity thereof. Synchronous control intends to reduce the control system of the relative error between the two platforms; the basic method is to pass the relative error of the two platforms to coarse platform in order to reduce the errorThe coarse and fine coupling control system and synchronous control system of the lithographic projection apparatus is a servo system with high response speed, high positioning accuracy and having no overshoot. The main contributions of this text are the control methods of the lithographic projection apparatus. With the help of the simulation, we can draw the conclusion that the servo system has very excellent characters.