Research On Testing And Calibration Method Of S-parameters Of Microwave Planar Circuit Network

Accurate measurement of microwave integrated circuits and high frequency characteristics of high-speed devices is an important condition for the development of Microwave integrated circuits and devices. The traditional test method is to chip packaging and placed in the test box for testing, it can't get accurate high frequency performance integrated circuits and devices due to the package. Microwave on-chip detection technologies emerge to solve this problem. It is to achieve the film screening and improve the production efficiency of microwave semiconductor industry for the microwave on-chip detection technology.This paper studies the use of vector network analyzer and microwave probe station measurement problems in on-chip devices. First, it analyzes the sources of error in the measurement and description of methodology and describes the basic principle of error correction theory from the vector network analyzer measurement system structure. It also analyzes the nature of the TRL calibration method and prepares the corresponding TRL calibration procedure through the analysis and formula derivation principle on TRL calibration method. It designs the items for the TRL calibration under the need of the microwave probe and the frequency range and do some research on the method in the selection of multiple delay line. Finally, we use the PC, vector network analyzer and microwave probe station set up the on-chip measurement system, and in order to validate our own preparation and design of the TRL calibration procedure and the correct of TRL calibration, we measured HMMC5618 amplifier.