Research On Microwave Probe Used For Radio Frequency Testing

Accurately measuring the high-frequency characteristics of the chip to improve the design and manufacturing process is one of the important conditions for the development of high-speed and microwave integrated circuits.Microwave integrated circuit testing technology occupies an important position in today's integrated circuit industry.The high-efficiency testing technology-on-chip testing of integrated circuits relies on a complete set of microwave probe stations,and its key component,the microwave probe,has gradually become an important tool for semiconductor chip on-chip inspection technology.In this paper,a probe station for on-chip testing of microwave integrated circuits is studied.A complete test system for the microwave probe station includes a test machine,a test head,a probe card,a probe station,and related cables.The testing machine is responsible for analyzing and processing the test results to determine whether the test piece is intact.The test head is generally integrated with the test machine and is mainly used for signal acquisition.The probe card is a probe integrated for reliable contact with the pad on the wafer to ensure the accuracy of the test.The probe station is responsible for the transportation and positioning of the wafers,so that the wafers on the wafers are in contact with the probes in sequence and tested one by one.The overall structure can be divided into two major technical modules according to function: Loader module and Prober module.The key research is the microwave probe that can be used for RF testing.The probe tip is measured at a 153?m pitch.According to the data,the probe tip model of the GSG and GS structures is designed.It works near 40 GHz and tries to test it.The structure size is optimized.In addition,the calibration process of the microwave probe was investigated.The calibration of the microwave probe involves the matching calibration sheet and the corresponding calibration algorithm.Commonly used calibration algorithms are the SOLT algorithm and the TRL algorithm.The former is suitable for low frequency bands below 20 GHz,and the error is large in the high frequency band;the latter can be used in higher frequency bands.This paper investigates the two calibration algorithms and the production process of the calibration sheet.The above work is helpful for further research of microwave probes.