The Fabrication Of MOEMS Optical Switch Based On (100) Silicon

With the optical fiber communication developing towards to alloptical networks with big capacitance and high speed ,and maturationof micro-electronics mechanical technology ,optical switches whichcan switch optical signals directly has become a key device of alloptical networks。In communication networks, it can switch opticalsignals directly without traditional optical-to-electricity andelectricity-to-optical switching processes, so it can increase thecapacitance of optical communication and the switching speed. It canimplement route selection, wavelength selection, optical crossconnects, self-cure protect of all optical layer,has super marketpotential and vast application foreground in optical fibercommunication . Therefore ,the research in theory analysis,structuredesign and fabrication process of MEMS optical switches has quiteimportant signification, and will accelerate the development of opticalfiber communication enormously. Many research institutions at homeand abroad are also concentrated on the research of MEMS switches,and make much progress. Now optical switches main include: thermo-optical switches andacoustic- optical switches and bubbles optical switches and liquidcrystals optical switches and MOEMS optical switches. Opticalswitches with micromirror are widely used. Technology for thefabrication of vertical micromirror was bulk silicon micromachiningand surface micromachining. In this paper,some typical optical switches based on MicroElectronics Mechanical System are introduced.Different applicationsand recent progress of various switching technologies are...