The Fabrication And Performance Testing Of MOEMS Array Optical Switches

With the growing demand for information and communication, the development of high-speed communication devices has widely been highlighted. Optical transmission has been used for worldwide communications nowadays. Traditional optical communication devices, such as optical-electric conversion repeaters, converters become a"bottleneck"of high-speed optical for their lower conversion speed compared with optical transmission. In view of this, the development of new-type optical switches have started, it can achieve the optical layer routing, wavelength selection, optical cross-connect functions, has great potential and broad prospects for application in the field of optical fiber communications market. So it is important to develop the theoretical analysis, structural design, mechanical technology of MEMS optical switch and it will contribute significantly to the development of optical fiber communications.From the current technical situation, optical switches, primarily for the following categories: thermal-optics switches, electric-optical switches, voice-optics switches, liquid crystal optical switches, magneto-optical switches, holographic optical switches, micro-opto-electronics mechanical system (MOEMS) switches. Optical switches with micromirror are widely used. Technology for the fabrication of vertical micro-mirror was bulk silicon micromachining...