Research Of Femtosecond Laser Micro-and-nano Fabrication System And Functional Device Technics

As a new type of laser based technology,femtosecond laser two-photon microfabrication has its unique technological advantages,like true three dimensional fabrication ability,sub-micron resolution and low heat effect et al.It becomes more important in microfabrication technology research field.In this thesis,supported by the key project of "Functional devices micro fabrication technology via femtosecond laser"(No.50335050) from NSFC,the femtosecond laser microfabrication system is modified and the mechanism of two photon polymerization induced by femtosecond laser is studied.The fabrication parameters are optimized through the method of combination of the theory and experiment research.As well,several functional micro devices are designed, fabricated and measured.The main research contents are listed as following:1.An introduction of the home-made femtosecond laser micro fabrication system is given.Some modification work are done like 400nm fabrication optical route,lager scanning range stage as well as the controlling software.2.A further study of femtosecond laser two photon micro fabrication techniques is given.Based on free radical theory of two photon polymerization,the fabrication resolution as well as the fabricated line and surface are studied theoretically and experimentally.Constructed the MAX and MIN model to reconstruct the pre designed device and control the fabrication roughness and precision.During the process of three dimensional complex devices,thc dilation and erosion algorithm of mathematical morphology are introduced to improve the precision.The variable scanning distance according to the different slope of the devices profile to increase the fabrication precision and efficiency.3.Several functional micro devices are designed,fabricated and measured.A new resin,S-3,is used to fabricate high quality three-dimensional(3D) log-pile photonic crystal with good performance in the IR region.The fabrication of micro lens using an alternative annular scanning mode with continuous variable layer thickness by two photon polymerization is reported and their optical performances are also tested.Micro-rotors which can be used in laser driving experiments are fabricated by using z-incensement scanning method.Micro gear chain is successfully achieved by two photo micro fabrication assistant with micro assembling technique.Finally, femtosecond laser micro cutting cells are also experimentally researched.4.High transmission nanoscale ridge apertures like bowtie antenna aperture are fabricated and its optical property is measured.What is more,the feasibility of femtosecond laser assistant with nano aperture to realize nano fabrication is discussed.All these experimental and theoretical results will be helpful and give improvement in this research area especially for the three dimensional and complexity micro MEMS and its development along the direction of function and integration.