Research On Automated Testing Of Micro Air Pressure Sensor Based On SOC

The progress of the Micro Machining and Micro Electronic Mechanical System made the micro air pressure sensor based on SOC develop more rapidly. It is a real focus of designing a micro air pressure sensor to measure puny air pressure for these years. The experimentation test had become one of the basic methods for exploring the relationship between low air pressure and micro heating structures, and for founding micro air pressure sensors' design and evaluation technique use.This article introduces the SOC micro air pressure's fundament, design methods and processing technology. The peculiarities of the vacuum and the characteristics of the pressure sensor had been taken into careful consideration, thus an automated test system especially for micro air pressure use had been developed to provide the platform for the research.The system consists of a computer, a vacuum generator, instruments and test circuits. The computer controls the test circuits and dominates the Keithly2004 DC power to heat up the semiconductor sensor by constant voltage and current mode. The D/A card realizes the steady output of the low air pressure by utilizing the Fuzzy Arithmetic to adjust the electric valve, and the card also controls the Mass Flow Meter to regulate the air pressure individually. The A/D card is utilized to collecting the pressure signal and the sensor's responds. The collected data graph will be shown in the test's monitor, the voltage signals will be recorded in the text files, and the calculated results will be saved into Access database. Also, the text files can be transformed into Excel files for utilizing the Excel's data processing competences and its drawing facilities.The Object-oriented Software Construction method and the Visual C++ 6.0 language had been used to design the system's software, and modular approach too. The system's test had proven that this automated system is very convenient for operations and can provide the credible information for the semiconductor micro air pressure sensor research.