Esearch On The Pressure Micro-sensor Performance Testing

Among the numerous devices of MEMS, the micro silicon pressure sensor is most widely used. With the development and application of sensor, the Corresponding technology which is used to control and measure is paid attention and the requirement about new-kind sensor is higher.This article introduces a kind of Micro pressure sensor with range20kpa, the key point is about designment of sensor structure and Making process about micro pressure sensor. Design a testing device which is based on the piezoresistive micro pressure sensor.applied Basic knowledge of the micro-sensor, silicon piezoresistive effect, small deflection theory, film stress deformation mechanics and Wheatstone bridges knowledge to design the structure and size of the sensor. Small deflection theory to design the thickness of the elastic film, to determine the resistance of the arrangement, capture the maximum stress value, draw the sensor output value.The test apparatus consists of three parts of the pressure vessel, the detection circuit and temperature control system. Use this device to test the output characteristics of the piezoresistive pressure micro-sensor pressure, comparative analysis on test result, the design of the test device is divided into two parts of the hardware and software. The hardware includes a detection circuit and temperature control system, carried out a detailed description of each module; the software part is designed for the system program of the detecting circuit, the software platform and process design system are introduced. Finally, using the test apparatus to test the pressure of the output voltage of the sensor in the laboratory, research the influence of the ambient temperature on the sensitivity of the sensor.Using this test apparatus, output characteristics of pressure piezoresistive pressure micro-sensor were experimentally tested, and the test results were compared.test results shows:test result data consistent with the overall theoretical value sensor, the design test device is simple and effective, workable. It proves the correctness of the test device design principles and provide foundation for future optimization improvements.