Design And Study Of IC Fabrication Computer-aided Management System

It is well known that integrated circuit (IC) is the basis of modem information industry and information society. IC industry is fundamental and strategical for a country's national economy and defence. The China's IC design and fabrication capability is not to be compared with developed countries. The computer management capability of IC fabrication is also poor. So it is significant for us to study the pattern and method of IC fabrication management and to develop the management system.This paper's aim is to combine computer technology for information management with IC fabrication and to study the design method of computer-aided management system of IC fabrication. A concept of IC technology database is presented after IC process is analyzed in detail. The IC fabrication computer-aided management system-ICF_CAMS is developed according to the model of simplified IC process. The result of ICF_CAMS running shows that it has the expectant management capability of IC process and that the concept of IC technology database is correct and feasible.