Study On The Magnet-driven Microactuator With A Multilevel Meander Magnetic Core

MEMS (Micro-Electro-Mechanical System), a new emerging technology, introjects the microelectronic technology and the precise machine machining technology. Microsensor, microactuator and microelectronic mechanical components have been studied extensively in recent years. This thesis probes to the modeling and simulating of one of MEMS devices --a magnet-driven microactuator with a multilevel meander magnetic core .After the brief account of the contents, traits, application and development of the MEMS at home and abroad, the work principle of the magnet-driven microactuator, and some other kinds of magnet-driven microactuator and its application are discussed. The macro and microcosmic analysis which based on the energy are discussed in the paper. The macro-model which is based on the equivalent magnetic circuit principle is found. In the design of MEMS, the resolution model of every essential device, the accurate numeric analysis and calculation are required to achieve more precise and rational analyzed results. Finite element analysis method in electromagnetism calculation is employed, based on which the 2D-model is established and analyzed through the ANSYS, and the process and results of the simulation are described. The distributing of the magnetic field, flux density and the force throw on the cantilever are simulated primly by the model. Aiming at confirming the results of ANSYS analysis, it is compared with the results of the resolutive model .The results indicate that the ANSYS model stimulates the work of microactuator perfectly, which has great significance in the choice of material and the effect realization of the microactuator's design and application.