The Research And Development Of The Utility Program About Graphic Data Conversion For E-beam Lighography System

A kind of utility program for JBX-6AII, a kind of variable-shaped e-beam lithography system was developed out. The utility runs on personal computer. It converts exposal data from GIF format into JEOL51 format. It was proved to be practical and robust through exposal experiments. In this thesis, the system design, the process design and the algorithm design will be introduced.The system of the utility consists of two layers, the kernel one and the interface one. The kernel layer is implemented with pure C/C++. The kernel algorithms are encapsulated in it and it has excellent transportability. The interface layer is implemented with MFC.And the kernel layer is divided into source parsing part, conversion part and destination output part. According to the process flow, the conversion part consists of following modules: window clipping, 2D transforming, resizing, field cutting, sub-field cutting, outlining, reversal, self-cutting, spot cutting and verifying. The algorithms of these modules are given emphasis to in this thesis.In this thesis, recursive decent parsing method is adopted to parse GIF files. And a set of general rules are induced to parse other layout description languages and other kinds of data files.In this thesis, a new method is brought forward to sort overlapped intersectant points for oriented line segments. The method serves well in boolean calculations for oriented polygons.In this thesis, a new concept of line cutting is introduced. Based upon it, many algorithms in the conversion part are designed.