Kinematics And Telecontrolling System Of A Serial-parallel Micromanipulator

With the development of MEMS, its components are becoming increasingly tiny and integrating, and accordingly the micromanipulators for assembling those components are required to have higher resolution and precision. Conventional serial micromanipulators which have long open kinematic chains are not suitable for precise manipulation in microscopic scale because of their deficiencies of low stiffness and articulation error accumulation. On the contrary, in-parallel actuated micromanipulators have the advantages of more rigidity and accuracy, higher load capacity, and simple inverse kinematics, therefore they can be used to replace conventional serial ones to meet the rising need for higher precisionIn this dissertation, position kinematics of a micromanipulator with serial-parallel structure is studied. Due to its character of microscopic scale motion, a very simple position kinematic equation is achieved. Based on the equation obtained, the workspace of the serial-parallel micromanipulator is described, and the effect of different structural parameters on the workspace is also discussed. In order to evaluate the output errors caused by the structural errors and actuator errors, accuracy analysis is then conducted for this serial-parallel micromanipulator, and an approach based on software programming is presented for error compensation. Furthermore, genetic algorithms(GA) is introduced as a brand-new approach for solving the forward position kinematics of general Stewart platform. Discussed at the end of the dissertation is the telecontrolling system for monitoring and controlling the serial-parallel micromanipulator, including a Windows operating system and Visual C++ language based program for micromanipulation.