Effects Of Pulse Bias On TiCN Coating In Arc Ion Plating

In this dissertation, the TiCN film was deposited by cathodic vacuum arc (CVA) technique.Ticn films were prepared via discharge of high-purity Ti in Ar, N2 and C2H2 background. The dependence of microstructure, mechanical properties, and electrochemical properties on the different substrate bias was studied.It shows that as the substrate bias is going up, the film represent good qualities. The wear resistance can be improved but continue increase the film get a pool wear resistance. Corrosion resistance of thin film does not end with the increasing of bias, but lower.