Research On The Dynamic Characteristics Of Microstructure In MEMS

In the recent years MEMS has become a multidisciplinary leading issue. With their own small size, light weight, low power consumption, high speed, high sensitivity, MEMS has been very rapidly applied to the aerospace, military, biomedical, information, automation and other fields. However, in the past decades, it didn't develop so fast. Stability and reliability have become a bottleneck problem. So the research for the dynamics of the micro-structure is particularly urgent and important. Most of the past research on dynamics of MEMS didn't refer to the effect of viscous. However, a number of studies have found that the effect to dynamic characteristics very remarkable. Some experts have made such description that micro-beam vibration in the air was just like people swimming in the honey. So we can see viscous has profound effect on dynamics of MEMS. As most of the micro-system failure occurs in the portion. Therefore, we focus on the research for the dynamics of movable part. In the thesis, we do research on the micro-cantilever, which is often used as sensor in MEMS. We establish micro-cantilever dynamic equation through Newton Theory, Strain Gradient Theory and Hamilton principle. With the simplification of air damping we give a closed form solution. With Matlab simulation program can be established. The analysis of resonant frequency and its affecting factors of micro-cantilever also size effect can provide theory for the design of MEMS.