Modeling And Experimental Study Of An MEMS Electromagnetic Actuator

As compared with the traditional actuator, Micro-magnetic actuator has advantage such as smaller, lighter, cheaper and more stable process flow. The MEMS micro-actuator has great market potential and future applications.A planar type MEMS electromagnetic actuator is researched. It is composed of a planar coil, a copper elastic platform, and a silicon supporter. Based on the network solving method of magnetic circuits and the traditional lumped magnetomotive force model, a distributed dynamic magnetomotive force model is made to analyze the device. Considered about the influence of the dynamic working gap, a modification about the driving force is also made to optimize the model.The MEMS micro-actuator has been fabricated via micromaching technology. A polyimide insulation layer is used to fabricate the planar coil. Furthermore, the copper elastic platform was fabricated via electroplating and silicon wet etching process. And the silicon supporter is fabricated via silicon wet etching process to rectify the working gap.We tested the output characteristic of the micro-electromagnetic actuator. The experimental results indicate that it is much more reliable to build a model that considers the dynamic distributing effects of the magnetomotive force caused by dynamic working gap. And it helps to quantify the structure depending flux and magnetic force. Thus provide a theoretical method of further optimizing the simulation model of the microactuator.