| The analysis of samples in the laboratory usually requires bulky and expensive instruments.Chip laboratory（Lab-on-Chip,LOC）has rapidly become a hot research field because of its advantages such as automatic operation,low cost and real-time detection.Electrochemical,mechanical and optical detection are co mmonly used detection principles in chip laboratory.Electrochemical detection methods are often affected by the changes of temperature,p H and ion concentration of the electrode,so it is not easy to be preserved for a long time.On the other hand,mechanical testing needs expensive micro nano manufacturing technology.Therefore,the optical detection is more suitable for solid and sensitive chip laboratory systems,especially the detection technology based on fluorescence,and by introducing an optical resonant cavity into the chip laboratory,greatly improve the sensitivity of detection and signal-to-noise ratio,so that optical microflow laser has a wide range of applications in integrated biological sensing and biochemical detection.However,most optical flow-controlled lasers work at the level of a single optical cavity,which limits their applications in high-throughput biochemical sensing,high-speed wavelength switching and on-chip spectral analysis.Optical microfluidic array laser has a great application prospect.Our group has fabricated Fabry-Pérot（F-P）microcavity array with high quality factor in our previous work.In this paper,we will continue this work and propose two methods to generate optical microfluidic array laser based on F-P microcavity.The details are as follows.First,the fabrication of flat-concave F-P microcavity array and the generation of optical microfluidic array laser are studied.By combining the CO2 laser processing technology with the mask plate,a 3’3 micro-concave structure array with a period of 23.5μm was fabricated,and the concave mirror with array distribution was formed by plating high reflection dielectric film.An open F-P microcavity array is composed of an optical fiber-based planar mirror and an array concave mirror,and the corresponding experimental optical path is designed to test and verify the generation of the array laser.However,due to the parallelism and other problems,the effective array laser emission was not observed in the experimental process.Subsequently,we use a glass-based planar mirror and an array of concave mirrors to form a closed F-P microcavity array,and explore the generation of optical microfluidic laser.The experimental results show that the generation of optical microflow laser in different flat-concave F-P microcavities can be realized under a certain pump intensity,and the laser emission modes are different in different F-P microcavities.Secondly,the fabrication of microwell F-P microcavity array and the generation of optical microfluidic laser based on this structure are studied.A new lithography process based on SU-8 is designed,that is,by using die pressing and portable LED devices,a microchannel structure with flat surface and well-defined thickness is fabricated.And the generation of the optical microfluidic array laser is verified by the corresponding experimental optical path.firstly,the R6G dye is used as the gain medium to realize the simultaneous optical microfluidic array laser emission in all（6）F-P microcavities.The structural characteristics of each F-P microcavity are basically the same,and the output laser has the same characteristics.Then the SYTO13 dye marked on the DNA sequence is used as the gain medium to realize the laser emission in the F-P microcavity,but due to the repeated use of the corresponding mirror,the reflectivity of the mirror is not uniform.In the experimental results,only three microcavities can achieve laser emission.In the analysis of the experimental results,the analysis method based on image data is used and compared with the analysis results based on spectral data.The results show that the results of image data analysis are consistent with those of spectral data analysis,which proves the feasibility of image data analysis. |
