Modeling Of Semiconductor Production System And Productivity Optimization Of Diffusion Zone Based On Modelica

Semiconductor manufacturing is the cornerstone industry of the information age,which has been the focus of research by scholars and engineers in recent years.The economic benefit of semiconductor manufacturing enterprises can be improved by studying the modeling and productivity optimization of semiconductor production system and rationalizing the use of processing equipment.Semiconductor manufacturing system compared with other manufacturing production system,production process is more complicated,and it has and multiple batch process into the process flow,and the complex characteristics of the semiconductor manufacturing system is difficult to directly using the mathematical model expression,and semiconductor manufacturing system simulation model was constructed,can be directly to the production system are analyzed and adjusted.Based on this,this paper modeled and simulated the actual semiconductor production system to optimize the productivity of the production system.The work content is mainly divided into the following aspects:Firstly,the characteristics of the semiconductor production system were analyzed by taking the actual semiconductor production process and Intel Mini-Fab model as examples,and the reentrant characteristics of the semiconductor production system were expressed by using the process equipment model.The real semiconductor production system was decomposed into several subsystems with different functions,and the whole component framework was designed.A set of semiconductor production system component model was constructed by using Modelica modeling language and finite state automata,which was used to simulate and verify the actual semiconductor production system.The effectiveness and correctness of the component model constructed in this paper are verified by simulation and comparative analysis of a production system case.Then,taking the actual semiconductor diffusion zone workshop case as the research object,the system model of the production case is built by using the component model,and the concept of comprehensive utilization rate of batch processing station is proposed for batch processing process.Respectively from the minimum batch method based scheduling strategy and the rules of perspective,the average cycle time,average productivity,comprehensive utilization,bottleneck equipment utilization performance bottleneck index are compared,and the simulation analysis results show that compared with the bottleneck equipment utilization and comprehensive utilization bottleneck more suitable as a batch production system performance indicators;When the selected minimum batch value increases from small to large,the production system capacity increases first and then decreases,and when the minimum batch value is 4,the bottleneck comprehensive utilization rate is the highest and the production capacity is the highest.In general,when using the minimum lot method,the production system has a large capacity loss,and there is room for capacity optimization.Finally,to improve the production line capacity as the optimization goal,the process of the semiconductor diffusion zone production system case was analyzed,and a batch scheduling strategy to minimize the production loss of the bottleneck batch processing station was proposed.At the same time,the calculation process of the production loss of the batch processing station was analyzed in detail.Respectively in the case of the production system in the application of the batch scheduling policy and the actual semiconductor production line using the minimum batch method,compared the simulation results show that the proposed batch scheduling strategy can effectively improve the average productivity and bottleneck of batch processing station comprehensive utilization,reducing the average production cycle,reduce waste bottleneck equipment capacity,the capacity of the production system can be more fully used,improve corporate profitability.