The Study And Design Of High Voltage Test System For Semiconductor Discrete

With the development of semiconductor technology,China has become a major producer of semiconductor discrete in the world,so the requirement of testing must take into consideration.And the demand of tester is increasing sharply.It's revealed that the performance of tester an important way to improve quality and to improve production efficiency.The tester with wider voltage range,higher accuracy and higher speed,can test more kinds of devices.The main contents of this work are as follows:(1)On the basic of analyzing the property of PN junction and the structure of tester,this work evaluates the overall design of hardware,consist of high voltage forcing module,high voltage measuring module,current forcing module and current measuring module.(2)This work develops the hardware,which consist of HV board,IP board and Station.The HV board is used for forcing high voltage in the range of 0-1000 V,with the stable time less than 10 ms.The IP board is used for forcing current in the range of100 n A-200 m A,with the stable time less than 3 ms.The function of Station is to measure high voltage,in the range 0-1000 V,and to measure current,in the range of10 n A-1 m A?The accuracy is within 0.5%?(3)The program flow chart is showed,and the control function of BVCEO and ICEO is encapsulated.(4)This work evaluates the systematic error ?random error and gross error and try to correct them.Then EMI problems are discussed,and some are corrected within design phase.The tester is of low cost?high accuracy and high speed.It's evidenced that can be extensively used in the factory of semiconductor discrete.