Simulation Analysis And Optimization Design Of Piezoelectric Acceleration Sensor With Four Cantilever Beams

With the development of micro electro mechanical system(MEMS)technology and the maturity of micro mechanical acceleration sensor manufacturing technology,micro mechanical acceleration sensor has been widely used in many fields,such as automobile safety control and automatic navigation and positioning system,robot contour tracking and motion control,electronic products fall prevention and human behavior recognition,It is very important to study micro accelerometer.Compared with the traditional piezoelectric sensors with single arm and double arm structure,the four cantilever piezoelectric acceleration sensor has the advantages of high sensitivity,good stability,low transverse effect and noise,high dynamic range,high precision and easy installation,which is widely used in engineering.Therefore,the finite element simulation of four cantilever piezoelectric accelerometer has important theoretical significance and practical value.In this paper,the finite element simulation software ABAQUS is used to carry out the finite element modeling and simulation analysis of the four cantilever piezoelectric sensor.The simulation results of the sensor sensitivity and natural frequency are obtained,and the accuracy of the finite element simulation is verified by comparing with the theoretical calculation results.Combined with the orthogonal test method and range analysis,the influence order of the structural parameters of the cantilever beam on the performance of the sensor is determined,and the optimal parameter combination is obtained.On this basis,a sensitive beam structure is proposed as an improvement scheme of four cantilever structure,and its finite element simulation analysis is carried out.The simulation results show that the sensitive beam structure can obtain higher sensitivity and natural frequency than the four cantilever structure.Due to the specific performance requirements of sensors in practical engineering applications,the analysis methods of orthogonal test and finite element simulation are too cumbersome.In order to quickly and conveniently give the design reference of the sensor structure according to the performance index requirements,this paper takes the above orthogonal test data and finite element simulation data as training samples,establishes the sensor performance prediction model based on artificial neural network through MATLAB software,and selects a group of finite element simulation data to test the prediction ability of the neural network model,The test results show that the prediction model can accurately predict the performance of the sensor.In order to verify the accuracy of simulation results and obtain the sensor performance index of specific design scheme,it is often necessary to make accelerometer samples and test their performance.Aiming at the disadvantages of high cost,high labor intensity and low testing efficiency of the commonly used testing methods in the laboratory,a new design scheme of acceleration sensor simulation testing platform is proposed in this paper.Through the analysis of the total function and function decomposition of the test platform,the function model of the test platform is obtained.By using the method of function mapping structure,the component structure of each functional module is obtained,and the acceleration sensor simulation test platform is composed of them.The overall assembly relationship and working principle flow chart of the test platform are given.