Design And Simulation Of Small Three-axis Piezoelectric Acceleration Sensor

The piezoelectric acceleration sensor is a vibration-measuring component fabricated by the positive piezoelectric effect of piezoelectric ceramics.Compared with other types of acceleration sensors,it has the advantages of good stability,high repeatability,simple structure,aging resistance,high sensitivity,etc.It is widely used in industrial,aerospace,marine and other industrial fields for vibration measurement.However,the accelerometers currently used for industrialization are bulky and of high quality.Many cases do not meet the measurement requirements.The ability of MEMS series sensors to save data is not outstanding.The main research content of this paper is to design a small-volume,small-mass piezoelectric accelerometer with large-scale finite element simulation software ANSYS and simulate its structural mechanical properties,and further explore the structure of integrated triaxial piezoelectric accelerometer.Firstly,the theoretical study of the piezoelectric effect of piezoelectric materials,combined with the mechanical model of piezoelectric acceleration sensors,is used to study the mechanism of piezoelectric sensors.Combined with the existing typical structure for comparative analysis,analyze the advantages and disadvantages of various structures,select the triangular shear structure as the original design model,improve it and combine the ANSYS workbench18.0 finite element simulation software to carry out modal simulation and frequency simulation.Its electrical characteristics and vibration characteristics.According to the simulation results of the uniaxial structure,the integrated triaxial shear structure is explored and the structure simulation is carried out.In the subsequent output process,the circuit principle is optimized.In this paper,the following work is done: analyzing the electrical characteristics of piezoelectric sensitive materials,the basic principle of acceleration sensor,optimizing the subsequent amplification circuit;analyzing the main influence factors of the natural frequency of the acceleration sensor and designing an improved version of the triangular shear structure,combined with ANSYS limited The finite element simulation software is used to complete the modal response and frequency response analysis of the single-axis model.A small,lightweight triaxial shear type piezoelectric acceleration sensor is designed and its dynamic characteristics and frequency characteristics are analyzed.