Research On Submillimeter-wave On-chip Antenna And Active Phase Shifter In CMOS Technology

Since the 21st century,the position of electronic information technology in the construction of national defense has gradually increased,and the demand of military defense for spectrum resources is increasing,In addition,with the gradual rise of a new generation of mobile communication technology,the ever-increasing number of wireless terminal devices are connected to the network.Therefore,the spectrum resources of millimeter wave and below can not meet the requirements of wireless communication for capacity,delay and other performance.It is urgent to develop submillimeter wave(300 GHz?3000 GHz)/terahertz(0.1 THz?10 THz)communication technology,which contains wider spectrum,larger information capacity and shorter time delay.In recent years,the feature size of silicon-based processes has been continuously reduced,and the reduction of gate length maked up for the deficiency of electron mobility,therefor,in submillimeter wave/terahertz integrated circuit design,increasingly attention has been paid to low-cost,highly integrated silicon-based processes.First of all,research on improving the gain,radiation efficiency and integration of on-chip antenna are carried out,and designed a 400 GHz on-chip dielectric based on the 0.13-?m RF CMOS Silicon-On-Insulator(SOI)process.The resonator antenna uses a new octagonal slot structure for the radiating unit for the first time.The antenna gain at the center frequency is 10 dBi,the radiation efficiency is 55%,the cross polarization of the E/H plane is less than-25 dB,The core area of the antenna is 0.6×0.6 mm2(the area including the GSG pad is 0.88×0.88 mm2).In addition,this thesis designed a 170 GHz vector synthesis active phase shifter based on 55-nm CMOS process.The circuit mainly contains three modules,variable gain amplifier module,quadrature signal generator module(I/Q)and vector synthesis module.The variable gain amplifier adopts Current Steering Technique,which can achieve adjustable gain by tuning the voltage,and output two in-phase and unequal amplitude signals;a ?-type high-pass network and a low-pass network are adopted to quadrature signal generator module design.In the ?-type low-pass network,the open circuit transmission line is used as the equivalent capacitor to reduce the processing error.In the ?-type high-pass network,the "U"-like inductor is used to reduce the circuit area;The first stage of the vector synthesizer uses a cascode structure as the drive amplifier to compensate for the loss of the quadrature signal generator;the second stage uses two Gilbert units to realize the polarity selection by controlling the bias voltage,Synthesis of different phase shift signals.The achievable phase shift accuracy of this active phase shifter in the full phase range is 22.5°,its DC power consumption is 20.4 mW under 1.8V supply voltage,and the phase root mean square error is 7.3°,the overall area is 1.05×0.6 mm2(including DC pad and GSG pad).