| In recent years,the demand for all kinds of electronic products has been growing rapidly,which often leads to the shortage of production capacity due to the shortage of chips.The production of high-end chips is limited by the key technology level,low yield and insufficient capacity.To improve the chip production capacity and meet the market demand,it is necessary to continue to promote the research of chemical mechanical polishing,which is the key technology of chip manufacturing.Chemical Mechanical Polishing(CMP)plays an increasingly important role in chip manufacturing nowadays.The requirement of surface flatness becomes higher and higher with the reduction of feature size.The multi-layer structure of IC also makes the application of CMP in chip manufacturing increase significantly.We need to further study the chemical mechanical polishing technology,explore its processing mechanism,optimize the process parameters,and improve the processing quality and production efficiency.Friction,as the key variable of chemical mechanical polishing,has not been fully studied.In order to better study the friction,this design will design and study the online detection system of the friction of chemical mechanical polishing.The main contents are as follows:In order to meet the performance requirements of the polishing machine for data acquisition in the on-line inspection system,an experimental polishing machine was designed.The polishing system,polishing head system,detection unit and peripheral accessories of the main body of the polishing machine are designed according to the set performance parameters.A disc throwing system based on direct drive motor with stable operation and high structural stiffness is designed.A pressure loading device based on servo electric cylinder was designed.The closed-loop accurate control of polishing pressure was realized by using PID control method.The structure of connecting the push rod and the spindle of the loading device is designed,which can make the push rod compress the spindle but not rotate with the spindle when the pressure is loaded.The speed regulating motor is used to drive the spindle of the polishing head to rotate,and the speed can be controlled by the controller.The hardware of the on-line friction detection system was designed.Aiming at the deficiency of the performance of the pressure sensor built into the servo electric cylinder in the polishing pressure control system,the tension pressure sensor was selected to improve it,which could realize the loading of the polishing pressure from zero.After comparing a variety of measurement schemes,the multidimensional force sensor was used to directly measure the friction.The mechanical model of this method was simple,the measurement method was direct,and it was not affected by the form of polishing movement.According to the characteristics of the sensor measurement signal,the National Instruments NI-USB-6001 data acquisition card was selected.The input voltage range,the number of analog input ports,the resolution of analog-digital conversion,the sampling frequency and other parameters of the acquisition card all meet the acquisition requirements of sensor signals,and when the NI-USB-6001 data acquisition card is designed for the system software based on virtual instruments,Lab VIEW has a good support for it.The software of on-line friction detection system is designed,and the login verification function of on-line detection system is designed,including the design of front panel and the design of program block diagram.The function of the acquisition card configuration is designed,and the acquisition parameters can be set in the interface of the data acquisition system.The acquisition,processing and display functions of each signal are designed,and the waveform of each force signal can be displayed in real time on the interface of the data acquisition system.The function of data recording and saving is designed.The real-time measured data can be recorded and saved as Excel files. |
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