Study On 3D Morphology Measurement Method Of Differential Microscopy Based On Dual Linear Array Camera

The purpose of this work,"Study on 3D morphology measurement method of differential microscopy based on dual linear array camera",is to address the shortcomings and defects of the current micro 3D surface morphology measurement technology,such as small measurement range and low detection efficiency.A linear scanning differential confocal 3D morphology measurement method based on dual linear array camera is proposed,which can greatly improve the measurement range and detection efficiency while slightly reducing the measurement accuracy.The main research contents of this paper are as follows:(1)On the basis of the existing principle of single-point confocal microscopy,the principle and formula of the confocal microscopy of the traveling line were analyzed and deduced,and the correctness of the principle was verified by simulation and axial measurement experiments.Then,based on the principle of linear scanning imaging,the working principle and characteristics of the linear array camera were analyzed,and a linear scanning image Mosaic algorithm based on the linear array camera is proposed,and the feasibility of the algorithm was verified by an example test.Finally,according to the installation and debugging requirements of the dual linear array camera,an image registration algorithm suitable for the dual linear array camera was proposed,and the feasibility of the algorithm was verified by an image registration example.(2)In view of the installation and debugging requirements of the dual linear array camera,the CAD drawings of the dual optical path module were designed and drawn.According to the drawings,the physical object of the dual optical path module was customized and integrated into the existing measurement system.Then the software and hardware required by the line scanning differential confocal detection method were assembled on the measuring platform.Finally,the key parameters of the measurement system were analyzed,and the debugging and parameter setting of the system were completed.(3)On the integrated measuring platform,the calibration work of linear scanning differential confocal axial measurement methods with different line widths and different objective lenses was carried out,and the calibration curves of 10 repeated calibration experiments were fitted into a primary function.Then,the STEP area of the dime sample was repeatedly measured at the same position for three times,and the STEP area of the STEP-SI-5-1 standard sample was measured once by using two kinds of objective lenses.Then,a white light interferometer was used to measure the same designated STEP area of the dime sample and STEP-SI-5-1 standard sample for three times in succession.Finally,the measurement results of the two methods were compared and analyzed.The experimental results show that: Under the same conditions,the axial measurement accuracy and measurement stability of the proposed method are 6.744% and 5.96% lower than that of the white light interferometer,respectively,but the single measurement range and detection efficiency are 16.48 times and 6.59 times higher than that of the white light interferometer,and the proposed method does not need to stop during the measurement process.Only need to realize a focus,the sample can be continuously uninterrupted scanning detection,can meet the intelligent manufacturing industry production of large samples on the spot,real-time and efficient large range of detection needs.(4)In order to improve the measurement accuracy,two error correction methods were used to analyze the errors in the experiment of linear scanning differential confocal 3D morphology measurement method based on dual linear array camera.