Dynamic-static Coupling Simulation Analysis And Experimental Study Of Cymbal Piezoelectric Actuator

At present,many fields such as precision micro-fabrication and electronic manufacturing require more and more actuators,such as small size,large output force,fast response,large deformation displacement,etc.Therefore,traditional piezoelectric stack actuators are usually driven by static DC voltage due to their own characteristics,which makes it difficult to meet the requirements of large deformation displacement and large output force at the same time.Therefore,on the basis of the traditional static deformation,the static and dynamic resonant displacement output of the piezoelectric actuator is generated simultaneously by applying AC excitation to improve the output displacement of the piezoelectric actuator.The main work is as follows:(1)Three kinds of piezoelectric actuation modes of d15,d31 and d33 are analyzed.Among them,d15 mode has larger deformation under the same conditions.The axial deformation displacement of traditional piezoelectric stack and cymbal piezoelectric stack are compared and analyzed by finite element simulation software.The results show that cymbal piezoelectric stack has larger axial static deformation under the same boundary conditions.(2)Based on the results of finite element simulation analysis,a piezoelectric actuator of cymbal stack with energy-accumulating is proposed and designed by using the drawing software Auto CAD and Solidworks.(3)The sensitivity of the piezoelectric actuator is checked by workbench optimization module platform,the key dimensions are optimized and analyzed,and the whole structure is improved.Finite element analysis shows that the ideal resonant frequency of the optimized piezoelectric actuator is 24005Hz,the output speed is 0.53m/s and the output displacement is 4.13?10^-6m under the excitation of 70V dynamic-static coupling power supply.The output displacement is 6.75?10^-8m under non-resonant DC excitation and3.34?10^-6m under resonant AC excitation.(4)A prototype of energy-accumulating piezoelectric actuator was fabricated and its displacement output was tested under the excitation of a dynamic-static coupling power supply with a resonant frequency of 26897Hz.It was found that the displacement output of the energy-accumulating piezoelectric actuator under the same voltage value was larger than that of the DC and AC excitation.According to the test results,the output speed increases with the increase of voltage,and it changes linearly.The displacement output of the actuator is 1.12?10^-6m and the output speed is 0.64m/s under the excitation of 70V dynamic-static coupling power supply.