Basic Theory And Experimental Study On Inchworm-type Piezoelectric Actuator

1. IntroductionWith the development on Science&Technology of our society, many kinds of novel type precision positioning actuators were produced in order to meet the need of precision positioning system in according high technical area. Some of the developed actuators have exhibited the good application foreground in ultraprecision machining, precision optics, MEMS and el al. Because of the advantages of piezoelectric elements, such as small bulk, large generated force, high frequency response, high resolution of displacement and so on, the piezoelectric precision actuators become an important branch in the family of these novel actuators. Based on the projects of National High Technology Research and Development Program of China (863 Program) and National Natural Science Foundation of China (NSFC) , the research project of novel inchworm-type actuator via piezoelectric stacks drive was proposed in this thesis and the according theoretical analysis and experimental study was carried on.2. The basic theory on piezoelectric actuating technologyThe thesis analyzed the main performances and working principle of piezoelectric element and established the mechanics-electrics coupling equation for the system including piezoelectric stack and mechanical flexure mechanism. Based on those work, studied the working performances of piezoelectric stack by the numbers, including electrics characteristic, dynamics response characteristic, mechanics&loading characteristic, hysteresis, temperature characteristic and et al. All those work could be used to support the design and analysis for inchworm-type actuator. Based on those work, established the mechanics modal of clamping structure/actuating structure for Inchworm-type piezoelectric actuator.3. The working principle, classify of the inchworm-type piezoelectric actuator, and the performance analysis of flexure hingeBased on the working principle and the characteristic of mechanism, classified the inchworm-type piezoelectric actuator into walker type, pusher type and hybrid type (that is both walker and pusher) . Analyzed the mechanism, motion characteristic, and working performance of different type of actuator. According to the theory of...